Automated spray cleaning system for cleaning of trays

 

 

 

Applications

 

• Spray cleaning of trays and other furniture from diffusion and PECVD systems
• removal of SiN

 

 

Throughput

 

• 1 Tray /h when loading 6 trays / run

 

 

Substrate Sizes, Batch Sizes

 

• Trays up to 1.840 x 1.000 mm (chamber for 6 trays)
• 2.000 x 1.500 mm (chamber for 3 trays)