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Automated spray cleaning system for cleaning of boats
Applications
- Spray cleaning of graphite and quartz boats and other furniture from diffusion and PECVD systems
- removal of SiN respectively SiO2P2O5
Throughput
- 7,5 graphite boats / day (24h operation)
Substrate Sizes, Batch Sizes
- Max. size of trays: 1250 x 620 x 300mm
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