Acetoncarussel

 

 

 

• This Mask Stripping System is a wafer cleaning tool for stripping of un-diced and diced protective coated wafer with acetone (optional IPA)and DI-water

• The wafers mounted on dicing rings are fitted into a special clamping ring seal prevents acetone contacting the dicing foil

• The penetration of acetone into the dicing channels is prevented

• The wafer carousel is designed for 4" to 8" substrates

• The process chamber is sectional divided into a solvent chamber and a rinse chamber

• The media is taken to the wafer surface by flow controlled spray nozzles depending on the sensitivity of the device